Focused ion beam milled on-chip resonator nanostructures for applications in rare-earth-ion-doped Al2O3 active waveguides
Ay, F. and Kauppinen, L.J. and Bradley, J.D.B. and Wörhoff, K. and Ridder de, R.M. and Pollnau, M. (2009) Focused ion beam milled on-chip resonator nanostructures for applications in rare-earth-ion-doped Al2O3 active waveguides. In: LEOS Annual Meeting Conference, LEOS '09, 4-8 Oct. 2009, Belek-Antalya, Turkey.
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| Abstract: | Reflection gratings on Al2O3 channel waveguides were defined by focused ion beam milling. Fabry-Perot microcavities were fabricated and improved performance upon annealing was demonstrated, making them viable candidates as resonators for on-chip waveguide lasers. |
| Item Type: | Conference or Workshop Item |
| Copyright: | © 2009 IEEE |
| Faculty: | Electrical Engineering, Mathematics and Computer Science (EEMCS) |
| Research Group: | |
| Link to this item: | http://purl.utwente.nl/publications/69949 |
| Official URL: | http://dx.doi.org/10.1109/LEOS.2009.5343113 |
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