Focused ion beam milled on-chip resonator nanostructures for applications in rare-earth-ion-doped Al2O3 active waveguides


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Ay, F. and Kauppinen, L.J. and Bradley, J.D.B. and Wörhoff, K. and Ridder, R.M. de and Pollnau, M. (2009) Focused ion beam milled on-chip resonator nanostructures for applications in rare-earth-ion-doped Al2O3 active waveguides. In: LEOS Annual Meeting Conference, LEOS '09, 4-8 Oct. 2009, Belek-Antalya, Turkey (pp. pp. 379-380).

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Abstract:Reflection gratings on Al2O3 channel waveguides were defined by focused ion beam milling. Fabry-Perot microcavities were fabricated and improved performance upon annealing was demonstrated, making them viable candidates as resonators for on-chip waveguide lasers.
Item Type:Conference or Workshop Item
Copyright:© 2009 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/69949
Official URL:http://dx.doi.org/10.1109/LEOS.2009.5343113
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