A method for making a glass supported system, such glass supported system, and the use of a glass support therefor

Unnikrishnan, Sandeep and Jansen, Henricus Venantius and Berenschot, Johan Willem and Fazal, Imran and Louwerse, Marcus Cornelis and Sanders, Remco and Boer de, Meint Jelle and Elwenspoek, Miko Curt (2009) A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. Patent.

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Abstract:	The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supported within the confinement of the glass support, to a glass supported system, and to the use of a glass support therefor.
Item Type:	Patent
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/69826
Official URL:	http://v3.espacenet.com/textdoc?IDX=EP2112130
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