A method for making a glass supported system, such glass supported system, and the use of a glass support therefor

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Unnikrishnan, Sandeep and Jansen, Henricus Venantius and Berenschot, Johan Willem and Fazal, Imran and Louwerse, Marcus Cornelis and Sanders, Remco and Boer, Meint Jelle de and Elwenspoek, Miko Curt (2009) A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. Patent.

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Abstract:The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supported within the confinement of the glass support, to a glass supported system, and to the use of a glass support therefor.
Item Type:Patent
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/69826
Official URL:http://v3.espacenet.com/textdoc?IDX=EP2112130
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