A KrF-laser excited by a capacitively coupled longitudinal discharge


Gerber, T. and Peters, P.J.M. and Bastiaens, H.M.J. (1985) A KrF-laser excited by a capacitively coupled longitudinal discharge. Optics Communications, 53 (6). pp. 401-404. ISSN 0030-4018

open access
Abstract:The performance of a KrF excimer laser, excited by a discharge produced in a quartz tube between two metallic electrodes at its end and the inner tube wall serving as a dielectric electrode, is described. The dielectric electrode is capacitively coupled to a metallic electrode surrounding the quartz tube coaxially. Laser output energies up to 0.9 mJ in pulses having a duration of 6 ns FWHM could be obtained at a driving voltage of 100 kV.
Item Type:Article
Copyright:© 1985 Elsevier Science
Science and Technology (TNW)
Research Group:
Link to this item:http://purl.utwente.nl/publications/69443
Official URL:https://doi.org/10.1016/0030-4018(85)90026-4
Export this item as:BibTeX
HTML Citation
Reference Manager


Repository Staff Only: item control page