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A KrF-laser excited by a capacitively coupled longitudinal discharge
Gerber, T. and Peters, P.J.M. and Bastiaens, H.M.J. (1985) A KrF-laser excited by a capacitively coupled longitudinal discharge. Optics Communications, 53 (6). pp. 401-404. ISSN 0030-4018
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| Abstract: | The performance of a KrF excimer laser, excited by a discharge produced in a quartz tube between two metallic electrodes at its end and the inner tube wall serving as a dielectric electrode, is described. The dielectric electrode is capacitively coupled to a metallic electrode surrounding the quartz tube coaxially. Laser output energies up to 0.9 mJ in pulses having a duration of 6 ns FWHM could be obtained at a driving voltage of 100 kV. |
| Item Type: | Article |
| Copyright: | © 1985 Elsevier Science |
| Faculty: | Science and Technology (TNW) |
| Research Group: | |
| Link to this item: | http://purl.utwente.nl/publications/69443 |
| Official URL: | http://dx.doi.org/10.1016/0030-4018(85)90026-4 |
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