A KrF-laser excited by a capacitively coupled longitudinal discharge

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Gerber, T. and Peters, P.J.M. and Bastiaens, H.M.J. (1985) A KrF-laser excited by a capacitively coupled longitudinal discharge. Optics Communications, 53 (6). pp. 401-404. ISSN 0030-4018

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Abstract:The performance of a KrF excimer laser, excited by a discharge produced in a quartz tube between two metallic electrodes at its end and the inner tube wall serving as a dielectric electrode, is described. The dielectric electrode is capacitively coupled to a metallic electrode surrounding the quartz tube coaxially. Laser output energies up to 0.9 mJ in pulses having a duration of 6 ns FWHM could be obtained at a driving voltage of 100 kV.
Item Type:Article
Copyright:© 1985 Elsevier Science
Faculty:
Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/69443
Official URL:http://dx.doi.org/10.1016/0030-4018(85)90026-4
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