Metal contacts to lowly doped Si and ultra thin SOI


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Rajasekharan, Bijoy and Salm, Cora and Hueting, Ray and Wolters, Rob and Schmitz, Jurriaan (2009) Metal contacts to lowly doped Si and ultra thin SOI. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 103-104).

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Abstract:We present our investigations on the fabrication of ohmic and Schottky contacts of several metals on lowly doped bulk Si and SOI wafers. Through this paper we evaluate the fabrication of rectifying devices in which no doping is intentionally introduced.
Item Type:Conference or Workshop Item
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/69061
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