Micro coriolis mass flow sensor with integrated capacitive readout


Haneveld, J. and Lammerink, T.S.J. and Boer, M.J. de and Wiegerink, R.J. (2009) Micro coriolis mass flow sensor with integrated capacitive readout. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 25-29 January 2009, Sorrento, Italy (pp. pp. 463-466).

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Abstract:We have realized a micromachined micro Coriolis mass flow sensor with integrated capacitive readout to detect the extremely small Coriolis vibration of the sensor tube. A special comb-like detection electrode design eliminates the need for multiple metal layers and sacrificial layer etching methods. Using differential readout signals significantly reduces the influence of parasitic capacitances. In addition, the sensing electrodes have been realized on a suspended tube structure which will allow for tuning of the electrode separation by a DC current. First measurements using water, ethanol and white gas indicate that true mass flow is measured by the sensor and that sensor output is linear with mass flow. The measurement error is currently in the order of 2% of the full scale of 1.2 ml/hr for all measured liquids (which corresponds to 1.2 g/hr in the case of water).
Item Type:Conference or Workshop Item
Copyright:© 2009 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/68938
Official URL:https://doi.org/10.1109/MEMSYS.2009.4805419
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