Towards embedded control for resonant scanning MEMS micromirror


Kuijpers, A.A. and Lierop, D. and Sanders, R.H.M. and Tangenberg, J. and Moddejonge, H. and Eikenbroek, J.W.Th. and Lammerink, T.S.J. and Wiegerink, R.J. (2009) Towards embedded control for resonant scanning MEMS micromirror. Procedia Chemistry, 1 (1). pp. 1307-1310. ISSN 1876-6196

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Abstract:This paper describes the design and realization of an electrostatic actuated MEMS mirror operating at a resonance frequency of 23.5 KHz with a PLL feedback loop. The design is based upon a thorough understanding of the (non-linear) dynamical behavior of the mirror. Using an external position sensitive device (PSD) the proper working of the PLL is demonstrated. Next we study the possibility to replace the PSD sensor with an embedded capacitive phase-angle sensor. We show measurements of capacitance changes with large parasitic influences while actuating the mirror in a feed forward mode. This demonstrates the feasibility of a fully embedded control for a resonant scanning MEMS mirror. Keywords: MEMS micromirror; laser display; raster scanning, capacitive tilt-angle sensor; PLL

Item Type:Article
Additional information:Open access. Proceedings of the Eurosensors XXIII conference
Copyright:© 2009 Elsevier
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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