Thermal noise estimation in bio-inspired hair flow sensor

Dagamseh, A. and Krijnen, G. (2009) Thermal noise estimation in bio-inspired hair flow sensor. In: First International Conference on Natural and Biomimetic Mechanosensing, 26-28 October 2009, Dresden, Germany.

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Abstract:	In micromachining technology, the reduction in the size of the moving structures has many advantages in different applications. However, these moving structures are subjected to mechanical noise resulting from the molecule agitation. In this abstract, we investigate the thermal-mechanical noise in our artificial hair-flow sensor. The realization of such sensors with high sensitivities requires designs with both low thermal-mechanical noise and high-resolution of angular displacement.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/68535
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