The influence of cell window imperfections on the calibration and measured data of two types of rotating-analyzer ellipsometers

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Straaijer, A. and Hanekamp, L.J. and Bootsma, G.A. (1980) The influence of cell window imperfections on the calibration and measured data of two types of rotating-analyzer ellipsometers. Surface Science, 96 (1-3). pp. 217-231. ISSN 0039-6028

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Abstract:A graphical method has been developed to determine the plane of incidence in the presence of cell windows with small retardation. For two types of rotating-analyzer ellipsometers, expressions have been derived that relate the experimental parameters and the elements of the Mueller imperfection matrices of the windows. These matrices can be determined by measuring with and without cell windows. Measurements have been performed with three samples with different optical constants.
Item Type:Article
Copyright:© 1980 Elsevier Science
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Link to this item:http://purl.utwente.nl/publications/68491
Official URL:http://dx.doi.org/10.1016/0039-6028(80)90304-0
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