Chemically anisotropic single-crystalline silicon nanotetrahedra

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Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2009) Chemically anisotropic single-crystalline silicon nanotetrahedra. Nanotechnology, 20 (47). p. 475302. ISSN 0957-4484

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Abstract:We describe a method based on silicon micromachining to machine single-crystalline silicon nanoparticles bounded by (111) faces in the form of tetrahedra. The technology allows the fabrication of tetrahedra in a size range from 20 to 1000 nm side length, and gives the possibility to chemically modify sites (faces, edges and/or tips) within certain limits. The chemical modification is anticipated to facilitate the self-assembly into new supermaterials such as photonic crystals in the diamond lattice.
Item Type:Article
Copyright:© 2009 IOP Publishing
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/68367
Official URL:http://dx.doi.org/10.1088/0957-4484/20/47/475302
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