Large-scale integrated optics using TriPleX waveguide technology: from UV to IR


Heideman, René and Leinse, Arne and Hoving, Willem and Dekker, Ronald and Geuzebroek, Douwe and Klein, Edwin and Stoffer, Remco and Roeloffzen, Chris and Zhuang, Leimeng and Meijerink, Arjan (2009) Large-scale integrated optics using TriPleX waveguide technology: from UV to IR. In: Alexei L. Glebov & Ray T. Chen (Eds.), Photonics Packaging, Integration, and Interconnects IX. Proceedings of SPIE, 7221 . SPIE--The International Society for Optical Engineering, 72210R. ISBN 9780819474674

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Abstract:We present a new class of low-loss integrated optical waveguide structures as CMOS-compatible industrial standard for photonic integration on silicon or glass. A TriPleXTM waveguide is basically formed by a -preferably rectangular- silicon nitride (Si3N4) shell filled with and encapsulated by silicon dioxide (SiO2). The constituent materials are low-cost stoichiometric LPVCD end products which are very stable in time. Modal characteristics, birefringence, footprint size and insertion loss are controlled by design of the geometry. Several examples of new applications will be presented to demonstrate its high potential for large-scale integrated optical circuits for telecommunications, sensing and visible light applications.
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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