Fabrication and interfacing of nanochannel devices for single-molecule studies


Hoang, T.H. and Segers-Nolten, I.M. and Berenschot, J.W. and Boer, M.J. de and Tas, N.R. and Haneveld, J. and Elwenspoek, M.C. (2009) Fabrication and interfacing of nanochannel devices for single-molecule studies. Journal of Micromechanics and Microengineering, 19 (065017). 065017. ISSN 0960-1317

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Abstract:Nanochannel devices have been fabricated using standard micromachining techniques such as optical lithography, deposition and etching. 1D nanochannels with thin glass capping and through-wafer inlet/outlet ports were constructed. 2D nanochannels have been made transparent by oxidation of polysilicon channel wall for optical detection and these fragile channels were successfully connected to macro inlet ports. The interfacing from the macro world to the nanochannels was especially designed for optical observation of filling liquid inside nanochannels using an inverted microscope. Toward single-molecule studies, individual quantum dots were visualized in 150 nm height 1D nanochannels. The potential of 2D nanochannels for single-molecule studies was shown from a filling experiment with a fluorescent dye solution.
Item Type:Article
Copyright:© 2009 IOP Publishing
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/67993
Official URL:https://doi.org/10.1088/0960-1317/19/6/065017
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