High-Resolution Contact Printing with Chemically Patterned Flat Stamps Fabricated by Nanoimprint Lithography

Duan, Xuexin and Zhao, Yiping and Perl, András and Berenschot, Erwin and Reinhoudt, David N. and Huskens, Jurriaan (2009) High-Resolution Contact Printing with Chemically Patterned Flat Stamps Fabricated by Nanoimprint Lithography. Advanced Materials, 21 (27). pp. 2798-2802. ISSN 0935-9648

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Abstract:	Chemically patterned flat stamps provide an effective solution to avoid mechanical stamp-stability problems currently encountered in microcontact printing. A new method is developed to fabricate chemical patterns on a flat PDMS stamp using nanoimprint lithography. Sub-100 nm gold patterns are successfully replicated by these chemically patterned flat PDMS stamps.
Item Type:	Article
Copyright:	© 2009 Wiley InterScience
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS) Science and Technology (TNW)
Research Group:	Transducers Science and Technology (TST) Molecular Nanofabrication (MNF)
Link to this item:	http://purl.utwente.nl/publications/67992
Official URL:	http://dx.doi.org/10.1002/adma.200803809
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