Parallel optical readout of a cantilever array in dynamic mode


Koelmans, W.W. and Honschoten, J.W. van and Vettiger, P. and Abelmann, L. and Elwenspoek, M.C. (2009) Parallel optical readout of a cantilever array in dynamic mode. In: International Workshop on Nanomechanical Cantilever Sensors 2009, 20-22 May 2009, Jeju, South Korea.

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Abstract:In this work we present parallel optical readout of a cantilever array which operates in dynamic mode using a standard optical beam deflection configuration containing only one laser-detector pair. We show accurate readout of the resonance frequency shift of an individual cantilever within an array by designing arrays where each cantilever has a different resonance frequency. The different resonance frequencies are created by giving each cantilever a different length and allow parallel readout of all cantilevers within the array. We show that even if the cantilevers are closely spaced each cantilever resonance frequency can be individually tracked without signs of cross-talk at current measurement precision (below 12 mHz). Interference of the laser light reflecting of each cantilever is observed when the amplitude of the cantilever is on the order of the wavelength of the laser light.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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