Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications

Iordache, G. and Holleman, J. and Kovalgin, A.Y. and Jenneboer, A.J.S.M. (2003) Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications. In: Proceedings of the 6th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2003, 25 - 26 November 2003, Veldhoven, The Netherlands.

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Abstract:	We have designed and realized a new antifuse hot-spot device to be used in gas sensing applications. The antifuse structure was realized on a suspended membrane to minimize the heat losses. For the sensing of alkanes a procedure for making a porous alumina layer doped with Platinum was developed. The device was electrically characterized and gas sensing experiments were conducted.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Semiconductor Components (SC)
Link to this item:	http://purl.utwente.nl/publications/67742
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