Three-dimensional IC's prolong the life of Moore's law


Brunets, I. and Boogaard, A. and Isai, I.G. and Aarnink, A.A.I. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2005) Three-dimensional IC's prolong the life of Moore's law. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, the Netherlands (pp. pp. 76-78).

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Abstract:In this work we make steps forwards developing a low-temperature technology intended for the fabrication of 3-D structures. Several technology steps like low-temperature deposition of semiconductor and dielectric thin films, laser crystallization and planarization are described and discussed regarding the process characterization.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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