Fabrication of dense flow sensor arrays on flexible membranes

Izadi, N. and Boer de, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Mogdans, J. and Krijnen, G.J.M. (2009) Fabrication of dense flow sensor arrays on flexible membranes. In: 15th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2009, 21-25 June 2009, Denver, CO, USA.

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Abstract:	Biological sensory systems often display great performance which inspires engineers to design artificial counterparts. In this paper we report the fabrication of aquatic hair based flow sensors inspired by fish lateral line. Geometrically optimized flexible membranes of SU-8 with integrated electrodes underneath have been realized in a reliable, high yield process. By separating the liquid medium from readout electrodes we decrease squeeze film damping and eliminate electrolysis. The procedure allows dense membrane array fabrication.
Item Type:	Conference or Workshop Item
Copyright:	© 2009 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/67518
Official URL:	http://dx.doi.org/10.1109/SENSOR.2009.5285945
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