Self assembled three-dimensional nonvolatile memories

Abelmann, Leon and Tas, Niels and Berenschot, Erwin and Elwenspoek, Miko (2009) Self assembled three-dimensional nonvolatile memories. [Report]

Preview

PDF
3111Kb

Abstract:	A promising strategy for for the realisation of three-dimensional memories could be the self assembly of articial sub-micron elements (smarticles). Such elements can be realised by combining edge-lithography techniques and anisotropic etching. The first experiments into this direction are encouraging.
Item Type:	Report
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/67517
Export this item as:	BibTeX EndNote HTML Citation Reference Manager

Repository Staff Only: item control page

Metis ID: 26915