Self assembled three-dimensional nonvolatile memories

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Abelmann, Leon and Tas, Niels and Berenschot, Erwin and Elwenspoek, Miko (2009) Self assembled three-dimensional nonvolatile memories. [Report]

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Abstract:A promising strategy for for the realisation of three-dimensional memories could be the self assembly of articial sub-micron elements (smarticles). Such elements can be realised by combining edge-lithography techniques and anisotropic etching. The first experiments into this direction are encouraging.
Item Type:Report
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/67517
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Metis ID: 26915