Process qualification strategy for advances embedded non volatile memory technology - the Philips'0.18um embedded flash case

Tao, Guoqiao and Scarpa, Andrea and Dijk van, Kitty and Kuper, Fred G. (2003) Process qualification strategy for advances embedded non volatile memory technology - the Philips'0.18um embedded flash case. In: 41st Annual International Reliability Physics Symposium, IRPS 2003, 30 March - 4 April 2003, Dallas, Texas, USA.

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Abstract:	A qualification strategy for advanced embedded non-volatile memory technology has been revealed. This strategy consists of: a thorough understanding of the requirements, extensive use and frequent update of the FMEA (failure mode effect analysis), a qualification plan with excellent coverage of all the risk areas, implementing effective in-line and off-line measures and control, and check-off of all the tests with good results. With such a strategy in place, the Philips 0.18 /spl mu/m embedded flash technology has been successfully qualified for volume production.
Item Type:	Conference or Workshop Item
Copyright:	© 2003 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Link to this item:	http://purl.utwente.nl/publications/67502
Official URL:	http://dx.doi.org/10.1109/RELPHY.2003.1197827
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