Highly sensitive biomimetic flow sensor arrays


Jaganatharaja, R.K. and Bruinink, C.M. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Highly sensitive biomimetic flow sensor arrays. In: The Sense of Contact 11, 8 April 2009, Zeist, The Netherlands.

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Abstract:In this paper, we report, to the best of our knowledge [1], the most sensitive artificial hair-based flow-sensor arrays operating in air, to date. Artificial hair sensors are bio-inspired from crickets’ cerci, one of nature’s best in sensing small air flows. The presented hair sensor arrays aim to realize higher sensitivity by means of model-based design optimizations and fabricated with advanced MEMS technologies. The presented artificial hair-sensor arrays display a clear figure-of-eight response and show remarkable sensitivities to oscillating air flows down to 0.85 mm/s that surpass noise levels even at 1 kHz operational bandwidths.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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