Highly sensitive biomimetic flow sensor arrays


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Jaganatharaja, R.K. and Bruinink, C.M. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Highly sensitive biomimetic flow sensor arrays. In: The Sense of Contact 11, 8 April 2009, Zeist, The Netherlands.

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Abstract:In this paper, we report, to the best of our knowledge [1], the most sensitive artificial hair-based flow-sensor arrays operating in air, to date. Artificial hair sensors are bio-inspired from crickets’ cerci, one of nature’s best in sensing small air flows. The presented hair sensor arrays aim to realize higher sensitivity by means of model-based design optimizations and fabricated with advanced MEMS technologies. The presented artificial hair-sensor arrays display a clear figure-of-eight response and show remarkable sensitivities to oscillating air flows down to 0.85 mm/s that surpass noise levels even at 1 kHz operational bandwidths.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/67471
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