Biomimetic aquatic hair sensors fabrication

Izadi, N. and Boer de, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Biomimetic aquatic hair sensors fabrication. In: The Sense of Contact 11, 8 April 2009, Zeist, The Netherlands.

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Abstract:	A fabrication scheme to realize a flow sensor array for operation in liquid which biomimics fish lateral line is presented. To keep advantages of differential capacitive readout [1] we have designed a process for fabrication of thin, fully supported, flexible membranes with electrodes beneath them, on top of a substrate to prevent electrode/liquid contact and strong damping effects associated with liquid filling the gap between capacitor electrodes.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/67468
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