Optimization of Cricket-inspired, biomimetic artificial hair sensors for flow sensing

Izadi, N. and Jaganatharaja, R.K. and Floris, J. and Krijnen, G.J.M. (2007) Optimization of Cricket-inspired, biomimetic artificial hair sensors for flow sensing. In: Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS 2007, 25-27 April 2007, Stresa, Italy.

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Abstract:	High density arrays of artificial hair sensors, bio¬mimicking the extremely sensitive mechanoreceptive filiform hairs found on cerci of crickets have been fabricated successfully. We assess the sensitivity of these artificial sensors and present a scheme for further optimization addressing the deteriorating effects of stress in the structures. We show that, by removing a portion of chromium electrodes close to the torsional beams, the upward lift at the edges of the membrane due to the stress, will decrease hence increase the sensitivity.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/67094
Official URL:	http://hal.inria.fr/docs/00/25/76/72/PDF/cr1050.pdf
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