Optimization of Cricket-inspired, biomimetic artificial hair sensors for flow sensing


Share/Save/Bookmark

Izadi, N. and Jaganatharaja, R.K. and Floris, J. and Krijnen, G.J.M. (2007) Optimization of Cricket-inspired, biomimetic artificial hair sensors for flow sensing. In: Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS 2007, 25-27 April 2007, Stresa, Italy.

[img]
Preview
PDF
375Kb
Abstract:High density arrays of artificial hair sensors, bio¬mimicking the extremely sensitive mechanoreceptive filiform hairs found on cerci of crickets have been fabricated successfully. We assess the sensitivity of these artificial sensors and present a scheme for further optimization addressing the deteriorating effects of stress in the structures. We show that, by removing a portion of chromium electrodes close to the torsional beams, the upward lift at the edges of the membrane due to the stress, will decrease hence increase the sensitivity.
Item Type:Conference or Workshop Item
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/67094
Official URL:http://hal.inria.fr/docs/00/25/76/72/PDF/cr1050.pdf
Export this item as:BibTeX
EndNote
HTML Citation
Reference Manager

 

Repository Staff Only: item control page

Metis ID: 241616