Methodology for performing RF reliability experiments on a generic test structure

Sasse, Guido T. and Vries de, Rein J. and Schmitz, Jurriaan (2007) Methodology for performing RF reliability experiments on a generic test structure. In: IEEE International Conference on Microelectronic Test Structures, ICMTS 2007, 19-22 March 2007, Tokyo, Japan.

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Abstract:	This paper discusses a new technique developed for generating well defined RF large voltage swing signals for on wafer experiments. This technique can be employed for performing a broad range of different RF reliability experiments on one generic test structure. The frequency dependence of a gate-oxide wear out stress was investigated using this methodology for frequencies of up to 1 GHz.
Item Type:	Conference or Workshop Item
Copyright:	© 2007 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Semiconductor Components (SC)
Link to this item:	http://purl.utwente.nl/publications/67043
Official URL:	http://dx.doi.org/10.1109/ICMTS.2007.374478
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