Fabrication and characterization of an electrostatic contraction beams micromotor


Sarajlic, E. and Berenschot, J.W. and Tas, N.R. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) Fabrication and characterization of an electrostatic contraction beams micromotor. In: 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, 22-26 January 2006, Istanbul, Turkey (pp. pp. 814-817).

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Abstract:We report on fabrication and experimental characterization of an electrostatic contraction beams motor that exhibits both reliable operation and high performance haracteristics. This electrostatic linear stepper micromotor is fabricated in a single polysilicon layer combining vertical trench isolation technology with standard surface micromachining. The entire motor, including two voltage-controlled clamps and eight pairs of contraction beams, fits in an area of 470 μm x 290 μm. Bidirectional stepping motion has been successfully demonstrated, generating a stroke of ± 70 μm by successively adding 10 nm steps. The motor was driven up to a cycling frequency of 80 kHz. An output force of 0.49 mN was measured for actuation voltages of 60 V on the beams and 50 V on the clamps. The motor was run for 160 hours at a cycling frequency of 10 kHz, generating nearly 5.8 billion steps.
Item Type:Conference or Workshop Item
Copyright:© 2006 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/66910
Official URL:https://doi.org/10.1109/MEMSYS.2006.1627924
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