Fabrication and characterization of an electrostatic contraction beams micromotor


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Sarajlic, E. and Berenschot, J.W. and Tas, N.R. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) Fabrication and characterization of an electrostatic contraction beams micromotor. In: 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, 22-26 January 2006, Istanbul, Turkey.

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Abstract:We report on fabrication and experimental characterization of an electrostatic contraction beams motor that exhibits both reliable operation and high performance haracteristics. This electrostatic linear stepper micromotor is fabricated in a single polysilicon layer combining vertical trench isolation technology with standard surface micromachining. The entire motor, including two voltage-controlled clamps and eight pairs of contraction beams, fits in an area of 470 μm x 290 μm. Bidirectional stepping motion has been successfully demonstrated, generating a stroke of ± 70 μm by successively adding 10 nm steps. The motor was driven up to a cycling frequency of 80 kHz. An output force of 0.49 mN was measured for actuation voltages of 60 V on the beams and 50 V on the clamps. The motor was run for 160 hours at a cycling frequency of 10 kHz, generating nearly 5.8 billion steps.
Item Type:Conference or Workshop Item
Copyright:© 2006 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/66910
Official URL:http://dx.doi.org/10.1109/MEMSYS.2006.1627924
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