Mems based hair flow-sensors as model systems for acoustic perception studies

Krijnen, Gijs J.M. and Dijkstra, Marcel and Baar van, John J. and Shankar, Siripurapu S. and Kuipers, Winfred J. and Boer de, Rik J.H. and Altpeter, Dominique and Lammerink, Theo S.J. and Wiegerink, Remco (2006) Mems based hair flow-sensors as model systems for acoustic perception studies. Nanotechnology, 17 . S84-S89. ISSN 0957-4484

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Abstract:	Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on themembrane and on the substrate form variable capacitors, allowing for capacitive read-out. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplification) and their susceptibility to noise (stochastic resonance).
Item Type:	Article
Copyright:	© 2006 IOP Publishing
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/66908
Official URL:	http://dx.doi.org/10.1088/0957-4484/17/4/013
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