Versatile surface channel concept for microfluidic applications


Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M. (2006) Versatile surface channel concept for microfluidic applications. In: 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006, 3-5 September 2006, Southampton, England (pp. pp. 37-40).

open access
Abstract:MEMS fluidic devices often require the integration of sensor/actuator structures with freely suspended microchannels. This article presents a versatile microchannel fabrication concept, allowing for easy fluidic interfacing to the microchannel and integration of sensor/actuator structures in close proximity to the fluid. Several micro-fluidic device structures have been fabricated, demonstrating the concept.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:
Export this item as:BibTeX
HTML Citation
Reference Manager


Repository Staff Only: item control page

Metis ID: 238773