Versatile surface channel concept for microfluidic applications

Dijkstra, M. and Boer de, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M. (2006) Versatile surface channel concept for microfluidic applications. In: 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006, 3-5 September 2006, Southampton, England.

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Abstract:	MEMS fluidic devices often require the integration of sensor/actuator structures with freely suspended microchannels. This article presents a versatile microchannel fabrication concept, allowing for easy fluidic interfacing to the microchannel and integration of sensor/actuator structures in close proximity to the fluid. Several micro-fluidic device structures have been fabricated, demonstrating the concept.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/66905
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