Analysis of packaging effects on the performance of the microflown


Honschoten, J.W. van and Yntema, D.R. and Dijkstra, M.A. and Svetovoy, V. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) Analysis of packaging effects on the performance of the microflown. In: DTIP of MEMS & MOEMS 2006, 26-28 April 2006, Stresa, Italy.

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Abstract:The packaging effects of an acoustic particle velocity sensor have been analysed both analytically and by means of finite volume simulations on fluid dynamics. The results are compared with acoustic experiments that show a large magnification of the output signal of the sensor due to the mounting inside a cylindrically shaped package. The influences of the package consist of a decrease of the output signal at frequencies below 1 Hz, whereas signals with frequencies above 10 Hz are amplified by a constant factor of approximately 3.5 (11 dB). The analysis leads to an improved insight into the effects of viscosity and fluid flow that play a role in flow sensing and opens the way for further optimisation of sensitivity and bandwidth of the sensor.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 238771