Drag force actuated bistable microswitches for flow sensing

Kuipers, W.J. and Baar van, J.J.J. and Dijkstra, M.A. and Wiegerink, R.J. and Lammerink, T.S.J. and Boer de, J.H. and Krijnen, G.J.M. (2006) Drag force actuated bistable microswitches for flow sensing. In: 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, 22-26 January 2006, Istanbul, Turkey.

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Abstract:	This paper presents bistable microswitches with Au contacts with the aim to combine them with artificial hairs for flow sensing. The Au contacts are applied on both ends of a silicon nitride beam, suspended by a torsional bar at its center. The beam is provided with electrodes for electrostatic actuation, which were used for characterization and can also be used for adaptive control of the mechanical properties of the flow sensor. The electrodes have been actuated in anti-phase to drive the microswitch similarly to an astable multivibrator. Single-sided switching has been measured up to 10 kHz actuation frequency.
Item Type:	Conference or Workshop Item
Copyright:	© 2006 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/66902
Official URL:	http://dx.doi.org/10.1109/MEMSYS.2006.1627885
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