Rotational precision MEMS-based clamping mechanism for stable fixation of elastic mechanisms

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Brouwer, Dannis M. and Jong, B.R. de and Boer, M.J. de and Soemers, H.M.J.R. (2006) Rotational precision MEMS-based clamping mechanism for stable fixation of elastic mechanisms. In: Annual Meeting of the American Society of Precision Engineering, ASPE, October 15-20, 2006, Monterey CA, USA (pp. pp. 275-278).

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Abstract:Conventional TEM sample manipulators often lack the crucial stability of 0.1 nm/min. A MEMS manipulator attached directly to the TEM pole would greatly increase both thermal and dynamic stability. However a stable E-beam requires no interference of electric or magnetic fields. Therefore the manipulator should be stably fixed without power. To this end a mechanical clamp is presented which clamps one of the actuators of the TEM sample manipulator (Figure 2). The clamp incorporates a relatively large clamp force of 0.5 mN with respect to the device area and is able to maintain the clamp force without external power. In previous work [1] a theoretical basis has been presented of an earlier clamp version. In this paper a rotational clamp which has been made and tested is presented. This clamp design is part of a research project for a 6 Degree of Freedom MEMS TEM sample manipulator.
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Engineering Technology (CTW)
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