A planar 3 DOF sample manipulator for nano-scale characterization


Jong, B.R. de and Brouwer, D.M. and Jansen, H.V. and Boer, M.J. de and Lammertink, T.G. and Stramigioli, S. and Krijnen, G.J.M. (2006) A planar 3 DOF sample manipulator for nano-scale characterization. In: 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, 22-26 January 2006, Istanbul, Turkey (pp. pp. 750-753).

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Abstract:We present the first monolithic manipulator for in-plane positioning in three degrees of freedom (DOF), based on a parallel flexure-mechanism. The manipulator stage is capable of translation in the x- and y-direction (maximum of ±9 μm) as well as rotation about the z-axis (maximum of ±2 degrees). A power-port based model has been developed to give insight in the systems behavior. The effect of anisotropy in the Young’s modulus of single crystalline silicon (SCS) on the flexure stiffness is modeled and matches the real system.
Item Type:Conference or Workshop Item
Copyright:© 2006 IEEE
Engineering Technology (CTW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/66881
Official URL:https://doi.org/10.1109/MEMSYS.2006.1627908
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