Carving fiber-top optomechanical transducers from an optical fiber

Deladi, S. and Iannuzzi, D. and Gadgil, V.J. and Schreuders, H. and Elwenspoek, M.C. (2006) Carving fiber-top optomechanical transducers from an optical fiber. Journal of micromechanics and microengineering, 16 . pp. 886-889. ISSN 0960-1317

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Abstract:	In a recent paper (Iannuzzi et al 2006 Monolithic fiber-top sensor for critical environments and standard applications Appl. Phys. Lett. 88 053501) we have presented the principle of the fiber-top position sensor, having a monolytical structure carved out of a single-mode optical fiber. The device alleviates sensing in a critical environment via interferometric readout, and because of its monolithic construction, facilitates plug-and-play utilization without alignment. In this paper we describe the fabrication method of a similar device which, however, was also equipped with a pyramidal tip on the top of the cantilever, an important detail for future implementation in scanning probe microscopy. A silicon surface was then periodically put in contact and moved out of contact with the device. The output signal resembles force curves that can be similarly obtained with atomic force microscopes.
Item Type:	Article
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/66879
Official URL:	http://dx.doi.org/10.1088/0960-1317/16/5/002
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