Design, fabrication and characterization of a novel gas microvalve using micro- and fine-machining

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Fazal, I. and Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2006) Design, fabrication and characterization of a novel gas microvalve using micro- and fine-machining. Journal of Micromechanics and Microengineering, 16 . pp. 1207-1214. ISSN 0960-1317

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Abstract:In this paper, we present the design, fabrication and characterization of a novel gas microvalve realized by combining micro- and fine-machining techniques. The design is for high flow rates at high pressure difference
between inlet and outlet, burst pressure of up to 15 bars. There is no power consumption required for the valve to maintain its position during operation
in any intermediate state and the process gas does not interact with the actuation mechanism. The microvalve was experimentally characterized with air flows. It is shown that flow rates of 220 ml min$^{−1}$ at a pressure difference of 4 bars could be achieved with a minimum accurate flow rate of 4 ml min$^{−1}$.
Item Type:Article
Copyright:© 2006 Institute of Physics
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/66870
Official URL:http://dx.doi.org/10.1088/0960-1317/16/7/013
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