Fully integrated three dimensional sound intensity sensor


Yntema, D.R. and Wiegerink, R.J. and Honschoten, J.W. van and Elwenspoek, M. (2007) Fully integrated three dimensional sound intensity sensor. In: 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 21-25 January 2007, Kobe, Japan (pp. pp. 51-54).

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Abstract:For the first time, a complete 3-dimensional sound intensity sensor – consisting of 4 particle velocity sensors and a pressure microphone – has been integrated on a single chip, providing the possibility to do nearly point measurements of acoustic particle velocity, sound pressure, and therefore sound intensity. Principally the sensor consists of two distinct designs; a pressure sensor and particle velocity sensors. In this paper the design of the sensor, fabrication and measurement results are discussed and compared with theoretical results.
Item Type:Conference or Workshop Item
Copyright:© 2007 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/66845
Official URL:https://doi.org/10.1109/MEMSYS.2007.4433010
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