Reliable fabrication of low-loss $Al_{2}O_{3}$ waveguides for active integrated optics


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Ay, F. and Wörhoff, K. and Bradley, J.D.B. and Pollnau, M. (2006) Reliable fabrication of low-loss $Al_{2}O_{3}$ waveguides for active integrated optics. In: 2nd EPS-QEOD Europhoton Conference on Solid-State and Fiber Coherent Light Sources - Europhysics Conference Abstracts, 10-15 September 2006, Pisa, Italy (pp. TuC2).

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Abstract:We developed an rf-based reactive co-sputtering process which resulted in uniform, reproducible deposition of low-loss $Al_{2}O_{3}$ waveguides. Due to their high optical quality these layers are promising host materials for rare-earth doped integrated optical devices.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/66698
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Metis ID: 237715