Reliable fabrication of low-loss $Al_{2}O_{3}$ waveguides for active integrated optics

Ay, F. and Wörhoff, K. and Bradley, J.D.B. and Pollnau, M. (2006) Reliable fabrication of low-loss $Al_{2}O_{3}$ waveguides for active integrated optics. In: 2nd EPS-QEOD Europhoton Conference on Solid-State and Fiber Coherent Light Sources - Europhysics Conference Abstracts, 10-15 September 2006, Pisa, Italy.

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Abstract:	We developed an rf-based reactive co-sputtering process which resulted in uniform, reproducible deposition of low-loss $Al_{2}O_{3}$ waveguides. Due to their high optical quality these layers are promising host materials for rare-earth doped integrated optical devices.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/66698
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Reliable fabrication of low-loss waveguides for active integrated optics

Reliable fabrication of low-loss $Al_{2}O_{3}$ waveguides for active integrated optics