Surface chemical state of sputtered Co-Cr films

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Masuda, T. and Geerts, W.J.M.A. and Lodder, J.C. (1991) Surface chemical state of sputtered Co-Cr films. Journal of Magnetism and Magnetic Materials, 95 (1). pp. 123-132. ISSN 0304-8853

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Abstract:Surface oxidation states of sputtered Co80Cr20 (at%) films were studied by performing Auger Electron Spectroscopy (AES) and X-ray Photoemission Spectroscopy (XPS). Seven samples having different thicknesses (from 50 to 1000 nm) which were grown under the same conditions have been studied. It was found from these experiments that among all the films the initial oxidation occured in the Cr; the the following diffusion of the Co was observed at the top layer. Consequently the surface consists of a four-layered structure. A weak thickness dependence in the films of the oxidized region was found from the results of AES measurements. The change of the saturation magnetization through the sample was calculated using the results of AES and XPS data. These calculations show that a region with enhanced saturation magnetization can be expected under the non-ferromagnetic top layer.
Item Type:Article
Copyright:© 1991 Elsevier
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/66138
Official URL:http://dx.doi.org/10.1016/0304-8853(91)90223-W
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Metis ID: 112354