Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements

Pham, Van So and Kauppinen, L.J. and Hoekstra, H.J.W.M. and Dijkstra, M. and Wolferen van, H.A.G.M. and Krijnen, G.J.M. and Ridder de, R.M. (2008) Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements. In: IEEE/LEOS Benelux Chapter 2008 Annual Symposium, 27-28 November 2008, Enschede, The Netherlands.

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Abstract:	We propose a novel and highly sensitive integrated read-out scheme, capable of detecting sub-nanometre deflections of a cantilever in close proximity to a grated waveguide structure. A very compact and stable sensor element can be realized by monolithically integrating a microcantilever structure with the grated waveguide (GWG), using conventional layer deposition and sacrificial layer etching techniques. The platform integrating a high quality GWG and a low initial bending cantilever has been fabricated and characterized.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/65280
Organisation URL:	http://www.photonics-benelux.org/
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