Borosilicate glass (DURAN®) tubes as micro-fluidic interconnects


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Mogulkoc, B. and Jansen, H.V. and Brake, H.J.M. ter and Elwenspoek, M.C. (2008) Borosilicate glass (DURAN®) tubes as micro-fluidic interconnects. In: Proceedings of the 19th micromechanics Europe conference, 28-30 Sept 2008, Aachen, Germany.

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Abstract:Capillary bonding of glass tubes to silicon wafers has been elaborated. After proper preparation, tubes are placed on silicon substrates and specimens are annealed at sintering temperatures of glass. The resulting interconnect is capable of working above 70 bars of filling pressure and
the bond is completely hermetic. However, due to high
temperature annealing in air, surface devitrification has been observed on glass, which can be avoided by vacuum
annealing
Item Type:Conference or Workshop Item
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/65256
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