Wafer scale nano-membranes supported on a silicon microsieve

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2007) Wafer scale nano-membranes supported on a silicon microsieve. In: Micromechanics Europe 2007, 16-18 September 2007, Portugal.

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Abstract:	A new micromachining method to fabricate wafer scale, atomically smooth nano-membranes is described. The delicate membrane is supported on a robust silicon microsieve fabricated by plasma etching. The supporting sieve is micromachined independently of the nano-membrane, which is later fusion bonded to it. The transferred thin-film membrane can be dense, porous or perforated according to the application desired. One of the main application areas for such membranes is in fluidics, where the small thickness and high strength of the supported nano-membranes is a big advantage. The novel method described enables to easily up-scale and interface micro or nano-membranes to the macro-world
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/65248
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