Modeling and characterization of the sensitivity of a hot-wire particle velocity sensor


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Honschoten van, J.W. and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M. (2008) Modeling and characterization of the sensitivity of a hot-wire particle velocity sensor. In: MME 2008, 19th MicroMechanics Europe Workshop, 28-30 September 2008, Aachen, Germany.

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Abstract:The sensitivity of an innovative acoustic sensor composed of four hot-wires is analyzed. An analytical model is presented that describes both the air flow and the temperature distribution in and around the probe. The presence of the chip surface in the vicinity of the wires influences the acoustic flow, while it also affects the temperature distribution. Both effects result into a specific angular dependence of the sensor sensitivity.
Acoustic measurements are compared with theory, showing good correspondence.
Item Type:Conference or Workshop Item
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/65234
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Metis ID: 255421