Integrated 3D sound intensity sensor with four-wire particle velocity sensors

Yntema, D.R. and Honschoten van, J.W. and Wiegerink, R.J. (2008) Integrated 3D sound intensity sensor with four-wire particle velocity sensors. In: DTIP 2008, Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS, 9-11 April 2008, Nice, France.

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Abstract:	A new symmetrical four-wire sensor configuration has resulted in a fully integrated sound intensity sensor with significant lower noise floor and smaller size than its predecessors. An integrated sound pressure sensor was further miniaturized by using a folded "back chamber" at both sides of the chip.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/65232
Official URL:	http://dx.doi.org/10.1109/DTIP.2008.4752976
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Metis ID: 255419