Design challenges for stepper motor actuated microvalve based on fine and micro-machining


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Fazal, I. and Elwenspoek, M.C. (2007) Design challenges for stepper motor actuated microvalve based on fine and micro-machining. In: 18th Workshop on MicroMechanics Europe MME 2007, 16-18 September 2007, Guimaraes, Portugal.

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Abstract:We present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the performance of the microvalve can be improved by using combination of different metal screws for mechanical transmission of power to deflect the membrane to control the flow of gas.
Item Type:Conference or Workshop Item
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/65194
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Metis ID: 254967