Focused ion beam nano-structuring of Bragg gratings in $Al_2O_3$ channel waveguides

Ay, Feridun and Uranga, Amaia and Bradley, Jonathan D.B. and Wörhoff, Kerstin and Ridder de, René M. and Pollnau, Markus (2008) Focused ion beam nano-structuring of Bragg gratings in $Al_2O_3$ channel waveguides. In: First International Workshop on FIB for Photonics, 13-14 June 2008, Eindhoven, the Netherlands.

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Abstract:	We report our recent results on an optimization study of focused ion beam (FIB) nano-structuring of Bragg gratings in $Al_2O_3$ channel waveguides. By optimizing FIB milling parameters such as ion current, dwell time, loop repetitions, scanning strategy, and applying a top metal layer for reducing charging effects and improving sidewall definition, reflection gratings with smooth and uniform sidewalls were achieved.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/65172
Official URL:	http://dx.doi.org/10.3990/1.9789036526784
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Focused ion beam nano-structuring of Bragg gratings in channel waveguides