Highly sensitive micro coriolis mass flow sensor


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Haneveld, J. and Lammerink, T.S.J. and Dijkstra, M.A. and Droogendijk, H. and de Boer, M.J. and Wiegerink, R.J. (2008) Highly sensitive micro coriolis mass flow sensor. In: MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems, 13-17 Jan 2008, Tucson, AZ, United States.

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Abstract:We have realized a micromachined micro Coriolis mass flow sensor consisting of a silicon nitride resonant tube of 40 ?m diameter and 1.2 μm wall thickness. Actuation of the sensor in resonance mode is achieved by Lorentz forces. First measurements with both gas and liquid flow have demonstrated a resolution in the order of 10 milligram per hour. The sensor can simultaneously be used as a density sensor.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/65154
Official URL:http://dx.doi.org/10.1109/MEMSYS.2008.4443807
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Metis ID: 252135