Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels

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Dijkstra, M. and Boer de, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels. Sensors and Actuators A: Physical, 143 (1). pp. 1-6. ISSN 0924-4247

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Abstract:A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for water flow up to flow rates in the order of 300 nl min-1. A versatile technological concept is used to realize a sensor with a thermally isolated freely suspended silicon-rich silicon-nitride microchannel directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid, while chemical-resistant fluidic connections can be made directly on top of the microchannel, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and 4.5 nl total fluid volume. A pressure driven flow setup was used to force water through the microchannel, measuring output sensitivity in the order of 0.2 μV/(nl min-1) for flows up to 300 nl min-1. The measured sensor output is in close agreement with results obtained from both a detailed and an approximate numerical model of the sensor.
Item Type:Article
Copyright:© 2008 Elsevier Science
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/65151
Official URL:http://dx.doi.org/10.1016/j.sna.2007.12.005
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Metis ID: 252133