Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels

Dijkstra, M. and Boer de, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels. Sensors and Actuators A: Physical, 143 (1). pp. 1-6. ISSN 0924-4247

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Abstract:	A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for water flow up to flow rates in the order of 300 nl min-1. A versatile technological concept is used to realize a sensor with a thermally isolated freely suspended silicon-rich silicon-nitride microchannel directly below the substrate surface. The microchannel concept allows for the planar integration of sensor structures in close proximity to the fluid, while chemical-resistant fluidic connections can be made directly on top of the microchannel, without introducing large dead-volumes. The realized flow sensor consists of a microchannel with low hydraulic resistance and 4.5 nl total fluid volume. A pressure driven flow setup was used to force water through the microchannel, measuring output sensitivity in the order of 0.2 μV/(nl min-1) for flows up to 300 nl min-1. The measured sensor output is in close agreement with results obtained from both a detailed and an approximate numerical model of the sensor.
Item Type:	Article
Copyright:	© 2008 Elsevier Science
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/65151
Official URL:	http://dx.doi.org/10.1016/j.sna.2007.12.005
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