Design considerations for micromechanical sensors using encapsulated built-in resonant strain gauges

Tilmans, Harrie A.C. and Bouwstra, Siebe and Fluitman, Jan H.J and Spence, Scott L. (1990) Design considerations for micromechanical sensors using encapsulated built-in resonant strain gauges. Sensors and Actuators A: Physical, 25 (1-3). pp. 79-86. ISSN 0924-4247

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Abstract:	This paper describes the various design aspects for micromechanical sensors consisting of a structure with encapsulated built-in resonant strain gauges. Analytical models are used to investigate the effect of device parameters on the behaviour of a pressure sensor and a force sensor. The analyses indicate that the sealing cap can have a strong degrading effect on the device performance if the thicknesses of the cap and of the supporting structure are of the same order of magnitude. A novel design, employing bossed structures, is described, which reduces the design complexity and virtually eliminates the influence of the cap on the sensitivity of the sensor.
Item Type:	Article
Copyright:	© 1990 Elsevier Science
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Link to this item:	http://purl.utwente.nl/publications/65140
Official URL:	http://dx.doi.org/10.1016/0924-4247(90)87012-8
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