Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer

Legtenberg, Rob and Bouwstra, Siebe and Fluitman, Jan H.J (1991) Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer. Sensors and Actuators A: Physical, 27 (1-3). pp. 723-727. ISSN 0924-4247

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Abstract:	A resonating microbridge mass flow sensor has been realized suspended inside a micro flow channel. Thin-film technologies and micromachining are used for the fabrication of the sensor wafer and a cap wafer with opposing V-grooves. A low-temperature glass-bonding technique is used to assemble the wafers allowing for feedthrough of the electrical connections. Measurements show sensitivities of the resonance frequency of several kHz per sccm nitrogen gas flows at average temperature elevations of the microbridge in the range 20 to 100°C.
Item Type:	Article
Copyright:	© 1991 Elsevier Sequoia
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Link to this item:	http://purl.utwente.nl/publications/65131
Official URL:	http://dx.doi.org/10.1016/0924-4247(91)87077-G
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