Piezoelectric impact force sensor array for tribological research on rigid disk storage media


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Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. and Tokuyama, M. and Hirose, S. (1995) Piezoelectric impact force sensor array for tribological research on rigid disk storage media. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 294-299).

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Abstract:This paper presents a method to measure impact forces on a surface by means of a piezoelectric thin film sensor array. The output signals of the sensor array provide information about the position, magnitude and wave form of the impact force. The sensor array may be used for tribological studies to the slider disk interface of a rigid disk storage device. In such a device a slider head assembly is flying above the rotating disk with a typical spacing of 100nm. Possible mechanical interactions between the slider and the disk are expected to produce impact forces in the order of 0.1N with a frequency range from 100kHz to 100MHz [1].
Item Type:Conference or Workshop Item
Copyright:© 1995 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/65092
Official URL:http://dx.doi.org/10.1109/MEMSYS.1995.472607
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