Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction

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Imai, S. and Tokuyama, M. and Hirose, S. and Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. (1995) Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction. IEEE Transactions on Magnetics, 31 (6). pp. 3009-3011. ISSN 0018-9464

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Abstract:A new type of Acoustic Emission sensor using a thin film piezoelectric material (sputtered ZnO) was developed for measuring head-disk interaction in a rigid magnetic disk system. The sensor is mounted on a Si slider (length: 3 mm) and was fabricated using micro-machining techniques in our on-going efforts to downsize sliders. Some fundamental tests of the sensor were conducted: sensitivity and frequency characteristics, and a flying test over a rotating bump disk.
Item Type:Article
Copyright:© 1995 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/65091
Official URL:http://dx.doi.org/10.1109/20.490253
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