Pulsed-laser deposited ZnO for device applications


King, S.L. and Gardeniers, J.G.E. and Boyd, I.W. (1996) Pulsed-laser deposited ZnO for device applications. In: Proceedings of the 1995 E-MRS Spring Conference, 2 April 1996, Strasbourg, France (pp. pp. 811-818).

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Abstract:The study investigates the growth by pulsed-laser deposition (PLD) of ZnO thin films for the eventual incorporation into piezo-electric actuators and other sensors being developed at the University of Twente. All films are purely c-axis oriented, and results are presented which suggest the production of some of the highest quality ZnO thin films yet reported. These include films with rocking curve full-width half-maxima (FWHM) down to 1.2° and (002) 2 θ peak FWHM (corrected) of 0.085°. Principally, X-ray diffraction analysis is detailed, and the shift in (002) peak position with changing deposition conditions is explored.
Item Type:Conference or Workshop Item
Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/65039
Official URL:https://doi.org/10.1016/0169-4332(96)80027-4
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