Pulsed-laser deposited ZnO for device applications

King, S.L. and Gardeniers, J.G.E. and Boyd, I.W. (1996) Pulsed-laser deposited ZnO for device applications. In: Proceedings of the 1995 E-MRS Spring Conference, 2 April 1996, Strasbourg, France.

Preview

PDF
603Kb

Abstract:	The study investigates the growth by pulsed-laser deposition (PLD) of ZnO thin films for the eventual incorporation into piezo-electric actuators and other sensors being developed at the University of Twente. All films are purely c-axis oriented, and results are presented which suggest the production of some of the highest quality ZnO thin films yet reported. These include films with rocking curve full-width half-maxima (FWHM) down to 1.2° and (002) 2 θ peak FWHM (corrected) of 0.085°. Principally, X-ray diffraction analysis is detailed, and the shift in (002) peak position with changing deposition conditions is explored.
Item Type:	Conference or Workshop Item
Faculty:	Science and Technology (TNW)
Research Group:	Mesoscale Chemical Systems (MCS)
Link to this item:	http://purl.utwente.nl/publications/65039
Official URL:	http://dx.doi.org/10.1016/0169-4332(96)80027-4
Export this item as:	BibTeX EndNote HTML Citation Reference Manager

Show download statistics for this publication

Repository Staff Only: item control page