Output characteristics of a thin-film piezoelectric AE sensor for magnetic head-disk interaction

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Imai, Satomitsu and Burger, Gert-Jan and Lammerink, Theo S.J. and Fluitman, Jan H.J. (1996) Output characteristics of a thin-film piezoelectric AE sensor for magnetic head-disk interaction. Transactions of the Japan Society of Mechanical Engineers/Nippon Kikai Gakkai Ronbunshu, C Hen, 62 (595). pp. 928-938. ISSN 0914-8825

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Abstract:A new type of acoustic emission (AE) sensor was developed for detecting head-disk interaction in magnetic disk devices. In order to develop a small sensor, we used a thin-film piezoelectric material and mounted it on the Si slider using micromachining techniques. We conducted a basic experiment and a simulation of sensor output, and confirmed that the simulation used here can predict sensor output characteristics. This paper describes the structure of the sensor and the method of simulation. We also performed several other simulations of sensor output characteristics using this method, and confirmed that the new sensor is applicable to tribological research on head-disk interaction.
Item Type:Article
Copyright:© 1996 Japan Society of Mechanical Engineers
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/65036
Official URL:http://ci.nii.ac.jp/naid/110002382533/en
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