Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by `COSMOS' program simulation

Dumitrescu, M. and Cobianu, C. and Lungu, D. and Dascalu, D. and Pascu, A. and van den Berg, A. and Gardeniers, J.G.E. and Kolev, S. and Ducso, C. and Barsony, I. (1997) Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by `COSMOS' program simulation. In: Proceedings of the 1997 International Semiconductor Conference, CAS. Part 1 (of 2),, 7-11 October 1997, Sinaia, Romania.

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Abstract:	The application of commercial 3-D software `COSMOS' for the design and thermal analysis of the low power consumption test structures with dielectric membrane for gas microsensors is presented. Within this work, the simulation provides the estimation of the temperature profile on the active area and the whole membrane including the four bridges and the heating efficiency in the temperature range 20-500 °C. Unravelling of the heat loss mechanisms in terms of radiation, convection, conduction by air and solid materials during heat transfer on the dielectric membrane is reported for the first time as a mean to evaluate by 3-D simulation the contribution of technological processes and lay-out design to the total heat losses.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS) Science and Technology (TNW)
Research Group:	Biomedical and Environmental Sensor systems (BIOS) Mesoscale Chemical Systems (MCS)
Link to this item:	http://purl.utwente.nl/publications/65021
Official URL:	http://dx.doi.org/10.1109/SMICND.1997.651567
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